Abstract
This paper aims to prepare lead-free piezoelectric ceramics with excellent properties by sol-gel process. There are some parameters such as structure, dielectricitypiezoelectricity and ferroelectricity for the ceramic materials as prepared, all of which have been analyzed herein. Design a new annealing method, i.e. a distributed annealing, compared with the traditional single-step annealing, this method greatly improves the film properties since it treats with every laminar layer by annealing in the film preparation process. There is an optimal temperature 700°C when using stepwise annealing. Experimental analysis reveals that the thicker the film, the greater the dielectric constant, and the lower the dielectric loss; the dielectric constant of the film heaves with the increase of the temperature. The thickness of the ceramic film is proportional to its polarization intensity, but inversely to the remnant polarization.
