Lin, P., Lai, Y., Ding, X., & Cheng, S. (2015). Effects of Substrate Temperature and Sputtering Power on the Optical and Electrical Properties of Al-doped Zinc Oxide Thin Films by Reactive RF Magnetron Sputtering. Chemical Engineering Transactions, 46, 1117-1122. https://doi.org/10.3303/CET1546187